Amorphization and solid‐phase epitaxial growth in tin‐ion‐implanted gallium arsenide
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.344959
Reference25 articles.
1. Electron microscope investigation of damage structure in gallium-arsenide bombarded with neon ions
2. Reordering of implanted amorphous layers in gaas
3. Ion implantation damage in GaAs: A TEM study of the variation with ion species and stoichiometry
4. Low‐temperature epitaxial regrowth of ion‐implanted amorphous GaAs
5. Stoichiometric disturbances in ion implanted GaAs and redistribution of Cr during annealing
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