Electron microscope investigation of damage structure in gallium-arsenide bombarded with neon ions
Author:
Publisher
Informa UK Limited
Subject
General Engineering
Link
http://www.tandfonline.com/doi/pdf/10.1080/00337576908235565
Reference22 articles.
1. Mayer, J. W. and Marsh, O. J. Technical Report Air Force Avionics Lab., A.F.A.L. TR/67/282.
2. Ion-implantation doping of semiconductors
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