Pressure and frequency dependence of ion bombardment energy distributions from rf discharges
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.346900
Reference14 articles.
1. A comparative study of the radio frequency discharge in gas mixtures of helium with flourine, oxygen, nitrogen, and argon
2. Effects of frequency on optical emission, electrical, ion, and etching characteristics of a radio frequency chlorine plasma
3. Ion bombardment energy distributions in radio‐frequency glow‐discharge systems
4. A System for Determining the Mass and Energy of Particles Incident on a Substrate in a Planar Diode Sputtering System
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