A time-resolved reflectivity study of the amorphous-to-crystalline transformation kinetics in dc-magnetron sputtered indium tin oxide
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.366731
Reference19 articles.
1. Crystallization of Amorphous In2O3Films during Film Growth
2. Influence of substrate temperature and film thickness on the structure of reactively evaporated In2O3 films
3. In situ study of amorphous to crystalline transition in indium oxide thin films using transmission electron microscopy
4. Structural Change during Annealing of Amorphous Indium-Tin Oxide Films Deposited by Sputtering withH2OAddition
5. Roles of bonded hydrogens and oxygen vacancies on crystallization of hydrogenated amorphous indium tin oxide (a-ITO:H) films
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