Observation of the mechanochemically polished surface of Si wafer by electron microscopy and diffuse x‐ray scattering
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.339134
Reference9 articles.
1. Diffuse x‐ray scattering from small defects in a very perfect silicon single crystal
2. Observation of small defects in silicon crystal by diffuse x‐ray scattering
3. Characterization of polished (111) silicon crystal surface by diffuse x‐ray scattering
4. Characterization of mechanochemically polished (111) surface of silicon crystal by diffuse x‐ray scattering
5. Scattering of X-rays from crystal surfaces
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4. Determination of composition distributions in InP/InGaAs/InP quantum-well structures by X-ray crystal truncation rod scattering and quantum levels;Journal of Crystal Growth;1998-03
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