Electron Scattering from Si Surface and Interface by Cross-Sectional Transmission Electron Microscopy
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Published:1994-11-15
Issue:Part 1, No. 11
Volume:33
Page:6406-6409
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:en
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Miyatake Hiroshi,Yoneda Masahiro,Murayama Keiichi,Harada Jimpei
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering