Deoxidation of (001) III–V semiconductors in metal-organic vapour phase epitaxy
Author:
Affiliation:
1. Technische Universität Berlin, EW 6-1, Institut für Festkörperphysik, Hardenbergstr. 36, 10623 Berlin, Germany
Funder
Bundesministerium für Bildung und Forschung (BMBF)
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4961414
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1. A multilayer model for GaAs oxides formed at room temperature in air as deduced from an XPS analysis
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4. Characterization of oxide layers on GaAs substrates
5. Measurement of GaAs surface oxide desorption temperatures
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