Leakage current analysis of silicon diode with anode activated by furnace annealing or laser annealing using deep level transient spectroscopy
Author:
Affiliation:
1. Fuji Electric Co., Ltd., 4-18-1, Tsukama, Matsumoto, Nagano 390-0821, Japan
2. University of Yamanashi, 4-3-11, Takeda, Kofu, Yamanashi 400-8511, Japan
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/5.0024744
Reference17 articles.
1. Deep level transient spectroscopic analysis of p/n junction implanted with boron in n-type silicon substrate
2. Deep‐level transient spectroscopy: A new method to characterize traps in semiconductors
3. Studies of Neutron-Produced Defects in Silicon by Deep-Level Transient Spectroscopy
4. S. M. Sze, Physics of Semiconductor Devices, 2nd ed. (Wiley Interscience Publication, 1981), pp. 117–122.
5. Nonmelt laser annealing of 5-KeV and 1-KeV boron-implanted silicon
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