Spherical shell model of an asymmetric rf discharge
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.343298
Reference11 articles.
1. Application of RF Discharges to Sputtering
2. Glow Discharge Phenomena in Plasma Etching and Plasma Deposition
3. Plasma potentials of 13.56‐MHz rf argon glow discharges in a planar system
4. Positive‐ion bombardment of substrates in rf diode glow discharge sputtering
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