Experimental measurements of the RF sheath thickness with a cylindrical Langmuir probe
Author:
Affiliation:
1. Institut Jean Lamour, Campus Artem, 2 allee André Guinier, 54011 Nancy, France
2. CRYOSCAN, Campus Artem, 2 allee André Guinier, 54011 Nancy, France
Funder
FP7 Fusion Energy Research
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5096018
Reference46 articles.
1. Principles of Plasma Discharges and Materials Processing
2. Physics of Radio-Frequency Plasmas
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