Positive‐ion bombardment of substrates in rf diode glow discharge sputtering
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1661054
Reference36 articles.
1. Superconductive Films Made by Protected Sputtering of Tantalum or Niobium
2. Properties of Superconducting Niobium Films Made by Asymmetric ac Sputtering
3. Thin Films Deposited by Bias Sputtering
4. Control of Film Properties by rf-Sputtering Techniques
5. Control of Film Properties by rf-Sputtering Techniques
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