A review of plasma-assisted deposition methods for amorphous carbon thin and ultrathin films with a focus on the cathodic vacuum arc technique
Author:
Funder
Western Digital
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Link
https://link.springer.com/content/pdf/10.1557/s43578-022-00868-9.pdf
Reference267 articles.
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3. M.K. Fung, K.H. Lai, C.Y. Chan, I. Bello, C.S. Lee, S.T. Lee, D.S. Mao, X. Wang, Mechanical properties and corrosion studies of amorphous carbon on magnetic disks prepared by ECR plasma technique. Thin Solid Films 368, 198 (2000)
4. R. Hauert, An overview on the tribological behavior of diamond-like carbon in technical and medical applications. Tribol. Int. 37, 991 (2004)
5. A. Erdemir, C. Donnet, Tribology of diamond-like carbon films: recent progress and future prospects. J. Phys. D 39, R311 (2006)
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