Effects of rf power on electron density and temperature, neutral temperature, and Te fluctuations in an inductively coupled plasma
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3126488
Reference51 articles.
1. The physics of discharge lamps
2. Industrial applications of low‐temperature plasma physics
3. Review of inductively coupled plasmas for plasma processing
4. Effect of multistep ionizations on the electron temperature in an argon inductively coupled plasma
5. On the multistep ionizations in an argon inductively coupled plasma
Cited by 14 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Investigation of branching fraction in the mechanically forced discharge region using optical emission spectrum;Optik;2022-06
2. A prospective microwave plasma source for in situ spaceflight applications;Journal of Analytical Atomic Spectrometry;2020
3. Fluorescence quenching and the “ring-mode” to “red-mode” transition in alkali inductively coupled plasmas;Journal of Applied Physics;2018-01-28
4. Imaging of spatial distributions of the millimeter wave intensity by using visible continuum radiation from a discharge in a Cs–Xe mixture. Part I: Review of the method and its fundamentals;Plasma Physics Reports;2017-02
5. On the E-H transition in inductively coupled radio frequency oxygen plasmas: I. Density and temperature of electrons, ground state and singlet metastable molecular oxygen;Plasma Sources Science and Technology;2017-01-19
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3