Investigation of branching fraction in the mechanically forced discharge region using optical emission spectrum

Author:

Mertadam Sercan,Tanişli Murat,Şahi̇n Neslihan

Funder

Eskişehir Osmangazi Üniversitesi

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference25 articles.

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3. Measurement of Ar resonance and metastable level number densities in argon containing plasmas;Fiebrandt;J. Phys. D: Appl. Phys.,2017

4. Plasma Etching: An Introduction (Plasma - Materials Interactions);Manos,1989

5. Film Deposition by Plasma Techniques;Konuma,1992

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