On the E-H transition in inductively coupled radio frequency oxygen plasmas: I. Density and temperature of electrons, ground state and singlet metastable molecular oxygen-Reference-Cited by-同舟云学术

On the E-H transition in inductively coupled radio frequency oxygen plasmas: I. Density and temperature of electrons, ground state and singlet metastable molecular oxygen

Published:2017-01-19 Issue:2 Volume:26 Page:025006
ISSN:1361-6595
Container-title:Plasma Sources Science and Technology
language:
Short-container-title:Plasma Sources Sci. Technol.

Author:

Wegner Th,Küllig C,Meichsner J

Funder

Deutsche Forschungsgemeinschaft

Publisher

IOP Publishing

Subject

Condensed Matter Physics

Link

http://stacks.iop.org/0963-0252/26/i=2/a=025006/pdf

Reference69 articles.

1. Inductive plasmas for plasma processing

2. Characterization of stationary and pulsed inductively coupled RF discharges for plasma sterilization

3. A double inductively coupled plasma for sterilization of medical devices

4. On the application of inductively coupled plasma discharges sustained in Ar/O2/N2ternary mixture for sterilization and decontamination of medical instruments

5. Inactivation of Bacteria by Non-Thermal Plasmas

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