Effect of multistep ionizations on the electron temperature in an argon inductively coupled plasma
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2056592
Reference11 articles.
1. Principles of Plasma Discharges and Materials Processing
2. Electron energy distribution function measurements and plasma parameters in inductively coupled argon plasma
3. Measurement of electron energy distribution in low-pressure RF discharges
4. A new smoothing method for obtaining the electron energy distribution function in plasmas by the numerical differentiation of the I‐V probe characteristic
5. Heating-mode transition in the capacitive mode of inductively coupled plasmas
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2. Optimization of overshoot in the pulsed radio frequency inductively coupled argon plasma by step waveform modulation;Journal of Applied Physics;2023-01-24
3. Highly efficient plasma generation in inductively coupled plasmas using a parallel capacitor;Journal of Vacuum Science & Technology A;2023-01
4. The Effect of Excited Species on the Collisional Energy of Argon Inductively Coupled Plasmas: A Global Model Study;Plasma;2022-01-04
5. Effect of RF bias power on discharge mode transition and its hysteresis in inductively coupled plasmas;Physics of Plasmas;2022-01
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