Composition, microstructure, and properties of crystalline molybdenum silicide thin films produced by annealing of amorphous Mo/Si multilayers
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.340440
Reference25 articles.
1. Properties of Sputtered Molybdenum Silicide Thin Films
2. Amorphous thin film diffusion barriers on GaAs and InP
3. Kinetics of formation of silicides: A review
4. A Useful Guide for X-Ray Stress Evaluation (XSE)
5. Characterization of low‐pressure chemical‐vapor‐deposited and thermally‐grown silicon nitride films
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