Two-dimensional electrical modeling of asymmetric radio-frequency discharges for geometry effect analysis. Comparison with experiments
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1389338
Reference17 articles.
1. Spherical shell model of an asymmetric rf discharge
2. The effect of radio frequency plasma processing reactor circuitry on plasma characteristics
3. Verification of frequency scaling laws for capacitive radio‐frequency discharges using two‐dimensional simulations*
4. Self‐consistent dc glow‐discharge simulations applied to diamond film deposition reactors
5. Particle-in-cell charged-particle simulations, plus Monte Carlo collisions with neutral atoms, PIC-MCC
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