Self‐consistent dc glow‐discharge simulations applied to diamond film deposition reactors
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.350575
Reference50 articles.
1. Low-Pressure, Metastable Growth of Diamond and "Diamondlike" Phases
2. Diamond synthesis from gas phase in microwave plasma
3. Diamond crystal growth by plasma chemical vapor deposition
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