Tuning the electrical properties of zirconium oxide thin films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1448667
Reference16 articles.
1. Alternative dielectrics to silicon dioxide for memory and logic devices
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5. Characterization of zirconia coatings deposited by inductively coupled plasma assisted chemical vapor deposition
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