Platinum gettering in silicon by phosphorus
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.95492
Reference18 articles.
1. Enhanced solubility and ion pairing of Cu and Au in heavily doped silicon at high temperatures
2. Direct comparison of ion−damage gettering and phosphorus−diffusion gettering of Au in Si
3. Simultaneous gettering of Au in silicon by phosphorus and dislocations
4. Gold solubility in silicon and gettering by phosphorus
5. Gold gettering in silicon by phosphorous diffusion and argon implantation: Mechanisms and limitations
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4. Evaluation of the effectiveness of back-side damage gettering in silicon introduced by a cavitating jet;Applied Physics Letters;2004-10-25
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