The dissociative adsorption of silane and disilane on Si(100)-(2×1)
Author:
Publisher
AIP Publishing
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2799980
Reference51 articles.
1. The interaction of silanes with silicon single crystal surfaces: microscopic processes and structures
2. Scanning-tunneling-microscopy studies of disilane adsorption and pyrolytic growth on Si(100)-(2x1)
3. Reactive sticking coefficients for silane and disilane on polycrystalline silicon
4. Si(001)2×1 gas‐source molecular‐beam epitaxy from Si2H6: Growth kinetics and boron doping
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