High temperature stability of PtSi formed by reaction of metal with silicon or by cosputtering
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.332010
Reference14 articles.
1. Thermal Stability of PtSi Films on Polysilicon Layers
2. Thermal stability of thin PtSi films on silicon substrates
3. Laser‐induced reactions of platinum and other metal films with silicon
4. Formation of shallow Schottky contacts to Si using Pt‐Si and Pd‐Si alloy films
5. Auger electron spectroscopy analysis of the contact reaction of PtSi codeposited films and silicon
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