Surface smoothing effect of an amorphous thin film deposited by atomic layer deposition on a surface with nano-sized roughness
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4866988
Reference14 articles.
1. An Extended Unified Schottky-Poole-Frenkel Theory to Explain the Current-Voltage Characteristics of Thin Film Metal-Insulator-Metal Capacitors with Examples for Various High-k Dielectric Materials
2. Application of an Extended Unified Schottky-Poole-Frenkel Model to High-k Capacitor Structures Used in Analog Integrated Circuit Technology
3. Leakage-current reduction in thin Ta/sub 2/O/sub 5/ films for high-density VLSI memories
4. In situ electric field simulation in metal/insulator/metal capacitors
5. ZnO/Al2O3 nanolaminates fabricated by atomic layer deposition: growth and surface roughness measurements
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