Vacuum ultraviolet to visible emission from hydrogen plasma: Effect of excitation frequency
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.373618
Reference62 articles.
1. Vacuum ultraviolet to visible emission of some pure gases and their mixtures used for plasma processing
2. Effects of frequency on optical emission, electrical, ion, and etching characteristics of a radio frequency chlorine plasma
3. Time‐dependent excitation in high‐ and low‐frequency chlorine plasmas
4. Frequency dependence of ion bombardment of grounded surfaces in rf argon glow discharges in a planar system
5. Frequency dependence on the structure of radio frequency glow discharges in Ar
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