VUV lasers pumped by diffuse discharges
Author:
Publisher
Springer Science and Business Media LLC
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
https://link.springer.com/content/pdf/10.1007/s00340-023-08125-5.pdf
Reference69 articles.
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2. A.E. Mironov, J. Kim, Y. Huang, A.W. Steinforth, D.J. Sievers, J.G. Eden, Photolithography in the vacuum ultraviolet (172 nm) with sub-400 nm resolution: photoablative patterning of nanostructures and optical components in bulk polymers and thin films on semiconductors. Nanoscale 12(32), 16796–16804 (2020). https://doi.org/10.1039/D0NR04142D
3. A.I.A. Soliman, C.-T. Wu, T. Utsunomiya, T. Ichii, H. Sugimura, Room temperature direct patterning of nanocrystalline zinc oxide on flexible polymer substrates through vacuum ultraviolet light irradiation. Thin Solid Films 709, 138166 (2020). https://doi.org/10.1016/j.tsf.2020.138166
4. I. Knyazev, V. Letokhov, V. Movshev, Efficient and practical hydrogen vacuum ultraviolet laser. IEEE J. Quantum Electron. 11(10), 805–817 (1975). https://doi.org/10.1109/JQE.1975.1068530
5. D. Mathew, H.M.J. Bastiaens, K.-J. Boller, P.J.M. Peters, Current filamentation in discharge-excited F2-based excimer laser gas mixtures. Appl. Phys. Lett. 88(10), 101502 (2006). https://doi.org/10.1063/1.2183363
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