Photolithography in the vacuum ultraviolet (172 nm) with sub-400 nm resolution: photoablative patterning of nanostructures and optical components in bulk polymers and thin films on semiconductors-Reference-Cited by-同舟云学术

Photolithography in the vacuum ultraviolet (172 nm) with sub-400 nm resolution: photoablative patterning of nanostructures and optical components in bulk polymers and thin films on semiconductors

Published:2020 Issue:32 Volume:12 Page:16796-16804
ISSN:2040-3364
Container-title:Nanoscale
language:en
Short-container-title:Nanoscale

Author:

Mironov Andrey E.¹²³⁴⁵^ORCID,Kim Jinhong¹²³⁴⁵^ORCID,Huang Yin¹²³⁴⁵,Steinforth Austin W.¹²³⁴⁵,Sievers Dane J.¹²³⁴⁵,Eden J. Gary¹²³⁴⁵

Affiliation:

1. Laboratory for Optical Physics and Engineering

2. Department of Electrical and Computer Engineering

3. Grainger College of Engineering

4. University of Illinois

5. Urbana

Abstract

Precision photoablation of bulk polymers or films with incoherent 172 nm radiation from flat, microplasma array-powered lamps provides the foundation for a photolithographic process in which an acrylic or other polymer serves as a dry photoresist.

Funder

Air Force Office of Scientific Research

Publisher

Royal Society of Chemistry (RSC)

Subject

General Materials Science

Link

http://pubs.rsc.org/en/content/articlepdf/2020/NR/D0NR04142D

Reference26 articles.

1. Nanolithography in microelectronics: A review

2. S.-S. Kim , R.Chalykh , H.Kim , S.Lee , C.Park , M.Hwang , J.-O.Park , J.Park , H.Kim , J.Jeon , I.Kim , D.Lee , J.Na , J.Kim , S.Lee , H.Kim and S.-W.Nam , Extreme Ultraviolet (EUV) Lithography VIII , 2017 , pp. 1–10

3. When lithography meets self-assembly: a review of recent advances in the directed assembly of complex metal nanostructures on planar and textured surfaces

4. Ultrafast deep UV Lithography with excimer lasers

5. P. Alagna , O.Zurita , V.Timoshkov , P.Wong , G.Rechtsteiner , J.Baselmans and J.Mailfert , Optical Microlithography XXVIII , 2015 , pp. 51–63

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Long pulse UV and VUV gas discharge lasers;XVI International Conference on Pulsed Lasers and Laser Applications;2023-11-02

2. VUV lasers pumped by diffuse discharges;Applied Physics B;2023-10-24

3. VUV lasing in diffuse discharges formed by runaway electrons;Laser Physics;2023-09-12

4. Foundations of plasma photonics: lamps, lasers, and electromagnetic devices;Plasma Sources Science and Technology;2022-12-01

5. Recent advances in engineering nanotopographic substrates for cell studies;Frontiers in Bioengineering and Biotechnology;2022-09-06