1. R. P. Seisyan, in Proceedings of the Japan-Russia Advanced Science and Technology Forum, Tokyo, 2000, pp. 164–172.
2. R. P. Seisyan, in Proceedings of the International Forum on Nanotechnologies (Rusnanotech’08), Moscow, 2008, p. 278.
3. S. Wolf, Microchip Manufacturing (Lattice, Sunstet Beach, 2004).
4. G. N. Berezin, A. V. Nikitin, and R. A. Sirus, Optical Backgrounds of Contact Photolithography (Radio i Svyaz’, Moscow, 1982) [in Russian].
5. R. P. Seisyan, Applied Physics: Microelectronics (SPb-GPU, St. Petersburg, 2002), Chap. 2 [in Russian].