Characterization of a high-density electron-cyclotron resonance plasma source operating in nitrogen
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1578154
Reference22 articles.
1. Characterization of a high-density, direct-current reflex discharge plasma source operating in Ar and N2
2. Plasma parameter characterization of a reflex plasma source operating in oxygen
3. The design and application of electron cyclotron resonance discharges
4. Pressure dependent mode transition in an electron cyclotron resonance plasma discharge
5. A workstation based Langmuir probe system for low‐pressure dc plasmas
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1. Diagnostics of Inductively Coupled Plasma Under the Influence of Immersed RF Self-Biased Substrate Electrode;IEEE Transactions on Plasma Science;2023
2. Diagnostics of downstream microwave electron cyclotron resonance (ECR) plasma;Journal of Physics: Conference Series;2010-02-01
3. Langmuir probe diagnostics of microwave electron cyclotron resonance (ECR) plasma;Vacuum;2008-09
4. Study on the characteristics of ECR plasma spatial distribution;Plasma Sources Science and Technology;2006-02-22
5. Kinetic modeling of low-pressure nitrogen discharges and post-discharges;The European Physical Journal Applied Physics;2004-11
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