Study on the characteristics of ECR plasma spatial distribution
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference21 articles.
1. Experimental electron energy distribution functions in argon, nitrogen and oxygen high-density and low-pressure reflex and microwave plasma sources
2. Characterization of a high-density electron-cyclotron resonance plasma source operating in nitrogen
3. Comparison of the radio frequency hollow cathode to the microwave antenna discharge for plasma processing
4. Intracavity laser absorption spectroscopy applied to measure the absolute density and temperature of N2(A3Σ+u) metastable molecules in a flowing N2microwave discharge
5. Precise control of atomic nitrogen production in an electron cyclotron resonance plasma using N2/noble gas mixtures
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1. Global model of miniature electron cyclotron resonance ion source;Acta Physica Sinica;2022
2. Enhancement of the ion flux to the substrate through high-voltage biasing in an electron cyclotron resonance plasma and its application to high-speed deposition of conductive carbon film;Japanese Journal of Applied Physics;2021-12-01
3. A global model of 2.45 GHz ECR ion sources for high intensity H+, H2+ and H3+ beams;Vacuum;2020-12
4. Numerical modeling of the effect of mirror magnetic field strength on electron distributions in electron cyclotron resonance plasma sources;Thin Solid Films;2020-11
5. Hydrogen dissociation in the deposition of GaN films with ECR-PECVD process;Indian Journal of Physics;2017-12-23
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