Plasma parameter characterization of a reflex plasma source operating in oxygen
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Published:2000-07-13
Issue:3
Volume:9
Page:288-294
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ISSN:0963-0252
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Container-title:Plasma Sources Science and Technology
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language:
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Short-container-title:Plasma Sources Sci. Technol.
Author:
Toader E I,Graham W G
Subject
Condensed Matter Physics
Cited by
7 articles.
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