Effects of gas pressure on 60/13.56 MHz dual-frequency capacitively coupled plasmas
Author:
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3587108
Reference42 articles.
1. Electrostatic modelling of dual frequency rf plasma discharges
2. Mode Transition Induced by Low-Frequency Current in Dual-Frequency Capacitive Discharges
3. Stochastic heating in single and dual frequency capacitive discharges
4. A nonlinear global model of a dual frequency capacitive discharge
5. Modulating effects of the low-frequency source on ion energy distributions in a dual frequency capacitively coupled plasma
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