Author:
Torigoe Kazuhisa,Arita Makoto,Motooka Teruaki
Subject
General Physics and Astronomy
Cited by
11 articles.
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1. In operando charge transport imaging of atomically thin dopant nanostructures in silicon;Nanoscale;2022
2. Microwave Microscopy and Its Applications;Annual Review of Materials Research;2020-07-01
3. Multiscale modeling methods;Handbook of Silicon Based MEMS Materials and Technologies;2020
4. Multimodal imaging technology by integrated scanning electron, force, and microwave microscopy and its application to study microscaled capacitors;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2018-03
5. Transmission microwave spectroscopy for local characterization of dielectric materials;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2017-01