Electrical and mechanical properties of ferroelectric thin films laser ablated from a Pb0.97Nd0.02(Zr0.55Ti0.45)O3 target
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.365663
Reference18 articles.
1. Thickness-scaling of sputtered PZT films in the 200 nm range for memory applications
2. Excimer laser ablation of PZT thin films on silicon cantilever beams
3. Metalorganic Chemical Vapor Deposition of Ferroelectric Pb(Zr,Ti)O3 Thin Films
4. rf planar magnetron sputtering and characterization of ferroelectric Pb(Zr,Ti)O3films
5. Preparation of PZT ferroelectric thin films by sol—gel processing and their properties
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