Residual stress and electrical properties of Pb(Zr 0.52 ,Ti 0.48 )O 3 thin films RF sputtered directly on Cu foils-Reference-Cited by-同舟云学术

Residual stress and electrical properties of Pb(Zr 0.52 ,Ti 0.48 )O 3 thin films RF sputtered directly on Cu foils

Published:2017-06-30 Issue:11 Volume:100 Page:5141-5150
ISSN:0002-7820
Container-title:Journal of the American Ceramic Society
language:en
Short-container-title:J Am Ceram Soc

Author:

Walenza‐Slabe Joel¹^ORCID,Gibbons Brady J.¹

Affiliation:

1. Materials Science School of Mechanical, Industrial and Manufacturing Engineering Oregon State University Corvallis Oregon

Funder

Army Research Laboratory

Publisher

Wiley

Subject

Materials Chemistry,Ceramics and Composites

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1111/jace.15037

Reference57 articles.

1. Piezoelectric and Acoustic Materials for Transducer Applications

2. Review: commercialization of piezoelectric single crystals for medical imaging applications;Chen J.;Proc‐IEEE Ultrason Symp,2005

3. Recent Progress in Materials Issues for Piezoelectric MEMS

4. Residual stresses in the electrode of Pt/Ti for the thermal detector with thin‐film structure;Kim K.K.K.;ISAF 2000 Proc 2000 12th IEEE Int. Symp. Appl. Ferroelectr (IEEE Cat. No.00CH37076),2000

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