Thickness-scaling of sputtered PZT films in the 200 nm range for memory applications-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Thickness-scaling of sputtered PZT films in the 200 nm range for memory applications

Published:1994-12 Issue:12 Volume:23 Page:1261-1268
ISSN:0361-5235
Container-title:Journal of Electronic Materials
language:en
Short-container-title:JEM

Author:

Sudhama C.,Kim J.,Khamankar R.,Chikarmane V.,Lee J. C.

Publisher

Springer Science and Business Media LLC

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/BF02649888.pdf

Reference22 articles.

1. J. Carrano, C. Sudhama, V. Chikarmane, J.C. Lee, A.F. Tasch and W. Shepherd and N. Abt,IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 38, (6) (November 1991), p. 690.

2. R. Moazzami, P.D. Maniar, R.E. Jones, A.C. Campbell and C.J. Mogab,IEDM Tech. Digest (1992), p. 973.

3. S.L. Miller, R.D. Nasby, J.R. Schwank, M.S. Rodgers and P.V. Dressendorfer,J. Appl. Phys. 68 (12) (15 December 1990), p. 6463.

4. S. Voldman, M. Marceau, A. Baker, E. Adler, S. Geissler, J. Slinkman, J. Johnson and M. Paggi,IEDM Tech. Digest (1992), p. 811.

5. T. Nishihara, N. Ikeda, H. Aozasa, Y. Miyazawa and A. Ochiai,IEDM Tech. Dig. (1992), p. 803.

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Preparation of free-standing multilayer hemispherical shell thin film using monodisperse polymer template;Journal of Alloys and Compounds;2018-01

2. Laser-Assited Growth and Characterization of Multicomponent Lead-Zirconate-Titanate Films;Crystal Growth Technology;2003

3. The electrical properties of high-dielectric-constant and ferroelectric thin films for very large scale integration circuits;Handbook of Thin Films;2002

4. Thickness Dependence of the Time Dependent Dielectric Breakdown Characteristics of Pb(Zr, Ti)O3Thin Film Capacitors for Memory Device Applications;Japanese Journal of Applied Physics;2000-06-15

5. Effect of laser-ablation process parameters and post-annealing treatment on ferroelectric PZT thin films;Applied Surface Science;1999-04

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3