Improving the structural quality and electrical resistance of SrTiO3 thin films on Si (001) via a two-step anneal-Reference-Cited by-同舟云学术

Improving the structural quality and electrical resistance of SrTiO3 thin films on Si (001) via a two-step anneal

Published:2016-01-28 Issue:4 Volume:119 Page:045301
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Zhang Lei¹^ORCID,Wang Yaqiang¹,Engel-Herbert Roman¹

Affiliation:

1. Department of Materials Science and Engineering and Materials Research Institute, Pennsylvania State University, University Park, Pennsylvania 16802, USA

Funder

Office of Naval Research (ONR)

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4939760

Reference59 articles.

1. Crystalline Oxides on Silicon: The First Five Monolayers

2. Two-dimensional growth of high-quality strontium titanate thin films on Si

3. (Invited) Monolithic Integration of Oxides on Semiconductors

4. Band-Gap Engineering at a Semiconductor-Crystalline Oxide Interface

5. Hetero-epitaxy of perovskite oxides on GaAs(001) by molecular beam epitaxy

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