Author:
Demkov Alexander A.,Posadas Agham B.,Seo Hosung,Choi Miri,Kormondy Kristy J.,Ponath Patrick,Hatch Richard C.,McDaniel Martin D.,Ngo Thong Q.,Ekerdt John G.
Abstract
Integration of functional oxides with semiconductors opens ways of creating novel hybrid architectures. However, epitaxy of these different types of materials brings challenges unlike those encountered in traditional semiconductor epitaxy. In this paper we will discuss our recent work on monolithic integration of perovskite oxides SrTiO3 and BaTiO3 on Si(001) and Ge(001), and the use of these pseudosubstrates to integrate other functional oxides using molecular beam epitaxy (MBE) and atomic layer deposition (ALD).
Publisher
The Electrochemical Society
Cited by
17 articles.
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