Author:
Eizenberg M.,Murarka S. P.,Heimann P. A.
Subject
General Physics and Astronomy
Cited by
26 articles.
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1. Synthesis of Ti3SiC2Powders: Reaction Mechanism;Journal of the American Ceramic Society;2007-03
2. Diffusion Barriers in Semiconductor Devices/Circuits;Diffusion Processes in Advanced Technological Materials;2005
3. Diffusion Barriers in Semiconductor Devices/Circuits;Diffusion Processes in Advanced Technological Materials;2005
4. In Situ Neutron Powder Diffraction Study of Ti3SiC2 Synthesis;Journal of the American Ceramic Society;2004-12-20
5. Multilayer TiC/TiN diffusion barrier films for copper;Applied Physics Letters;2002-01-07