Using the temperature dependence of resonator quality factor as a thermometer-Reference-Cited by-同舟云学术

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Using the temperature dependence of resonator quality factor as a thermometer

Published:2007-07-02 Issue:1 Volume:91 Page:013505
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Hopcroft M. A.,Kim B.,Chandorkar S.,Melamud R.,Agarwal M.,Jha C. M.,Bahl G.,Salvia J.,Mehta H.,Lee H. K.,Candler R. N.,Kenny T. W.

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.2753758

Reference9 articles.

1. An integrated CMOS micromechanical resonator high-Q oscillator

2. Long-Term and Accelerated Life Testing of a Novel Single-Wafer Vacuum Encapsulation for MEMS Resonators

3. Frequency stability of wafer-scale film encapsulated silicon based MEMS resonators

4. Impact of Geometry on Thermoelastic Dissipation in Micromechanical Resonant Beams

5. Engineering MEMS Resonators With Low Thermoelastic Damping

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