Robust resonant beams with a passively-controlled thermally-induced axial force and a designated stationary point
Author:
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
https://link.springer.com/content/pdf/10.1007/s00542-022-05404-7.pdf
Reference63 articles.
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2. Ali NA, Mohamadi AK (2015) Effect of thermoelastic damping in nonlinear beam model of mems resonators by differential quadrature method. J Appl Comput Mech 1(3): 112–121. https://doi.org/10.22055/jacm.2015.10935
3. Azevedo RG, Huang W, O’Reilly OM, Pisano AP (2008) Dual-mode temperature compensation for a comb-driven mems resonant strain gauge. Sens Actu Phys 144(2):374–380
4. Bambill DV, Guerrero GI, Felix DH (2017) Natural vibrations of micro beams with nonrigid supports. J Vib Control 23(19):3233–3246. https://doi.org/10.1177/1077546315627727
5. Beeby SP, Tudor MJ, White NM (2006) Energy harvesting vibration sources for microsystems applications. Measure Sci Technol 17(12):175–195
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