4H-Silicon Carbide as an Acoustic Material for MEMS
Author:
Affiliation:
1. School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA
Funder
Army Research Laboratory
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Acoustics and Ultrasonics,Instrumentation
Link
http://xplorestaging.ieee.org/ielx7/58/10287225/10144254.pdf?arnumber=10144254
Reference104 articles.
1. Substrate-decoupled, bulk-acoustic wave gyroscopes: Design and evaluation of next-generation environmentally robust devices
2. Temperature Dependence of Quality Factor in MEMS Resonators
3. Precision Deep Reactive Ion Etching of Monocrystalline 4H-SiCOI for Bulk Acoustic Wave Resonators with Ultra-Low Dissipation
4. Resonant pitch and roll silicon gyroscopes with sub-micron-gap slanted electrodes: Breaking the barrier toward high-performance monolithic inertial measurement units
5. Energy dissipation in micromechanical resonators
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. 4H silicon carbide bulk acoustic wave gyroscope with ultra-high Q-factor for on-chip inertial navigation;Communications Engineering;2024-06-25
2. Stress-Modulated Control of TCF and Frequency Shift in 4H-SiC Beam Resonators for Enhanced Thermal Stability;2024-06-18
3. Application of bulk silicon carbide technology in high temperature MEMS sensors;Materials Science in Semiconductor Processing;2024-04
4. 4H-SiC Beam Resonators with Tailored Local Zero TCF;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21
5. TA 0.34Deg/Hour Bulk Acoustic Wave Gyroscope in 4H Silicon-Carbide with an Elevated-Temperature Enhanced Q-Factor of 4.6 Million;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3