Structural change of polycrystalline silicon films with different deposition temperature
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.369755
Reference12 articles.
1. Control of Preferential Orientation in Polycrystalline Silicon Films Prepared by Plasma‐Enhanced Chemical Vapor Deposition
2. Relationship between electrical properties and structure in uniaxially oriented polycrystalline silicon films
3. Structure and grain boundary defects of glow‐discharge polycrystalline silicon films deposited using disilane
4. Effects of deposition temperature on polycrystalline silicon films using plasma-enhanced chemical vapor deposition
5. Initial Growth of Polycrystalline Silicon Films on Substrates Subjected to Different Plasma Treatments
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