A self-consistent method for solving ion diffusion and mobility coefficients
Author:
Affiliation:
1. School of Physics, Dalian University of Technology, Dalian 116024, People's Republic of China
Funder
National Natural Science Foundation of China
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
https://aip.scitation.org/doi/pdf/10.1063/5.0060272
Reference42 articles.
1. Principles of Plasma Discharges and Materials Processing
2. Investigation of active species in low-pressure capacitively coupled N2/Ar plasmas
3. Plasma uniformity in high-density inductively coupled plasma tools
4. Electron dynamics in low pressure capacitively coupled radio frequency discharges
5. A comparison of particle in cell and fluid model simulations of low‐pressure radio frequency discharges
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