Self-Coagulation Theory and Related Comet- and Semi-Circle-Shaped Structures in Electronegative and Gaseous Discharging Plasmas in the Laboratory

Abstract

In this work, the two-dimensional fluid models for two types of inductively coupled plasma, Ar/O2 and Ar/SF6, are numerically solved by the finite element method. Four interesting phenomena revealed by the simulations are reported: (1) comet-shaped and semi-circle-shaped structures in Ar/O2 and Ar/SF6 plasmas, respectively; (2) blue sheaths that surround the two structures; (3) the collapse and dispersion of semi-circle-shaped structures of certain Ar/SF6 plasma cations and anions when they are observed separately; and (4) the rebuilding of coagulated structures by minor cations in the Ar/SF6 plasma at the discharge center. From the simulation detail, it was found that the cooperation of free diffusion and negative chemical sources creates the coagulated structure of anions, and the self-coagulation theory is therefore built. The advective and ambipolar types of self-coagulation are put forth to explain the co-existence of blue sheath and internal neutral plasma, among which the advective type of self-coagulation extends the Bohm’s sheath theory of cations to anions, and the ambipolar type of self-coagulation originates from the idea of the ambipolar diffusion process, and it updates the recognition of people about the plasma collective interaction. During the ambipolar self-coagulation, each type of Ar/SF6 plasma cations and anions is self-coagulated, and the coagulated plasma species are then modeled as mass-point type (or point-charge type, more precisely). When the charge amounts of two point-charge models of plasma species with the same charge type are equal, the expelling effect caused by the Coulomb’s force of them leads to the collapse or dispersal of heavily coagulated species. The simulation shows that the lighter the species is, the easier it self-coagulates and the more difficult its coagulation is broken, which implies the inertia effect of density quantity. Moreover, the collapse of cation coagulation creates the spatially dispersed charge cloud that is not shielded into the Debye’s length, which indicates the anti-collective behavior of electronegative plasmas when they are self-coagulated. The rebuilt coagulated structure of minor Ar/SF6 plasma species at the discharge center and the weak coagulation of electrons in the periphery of the main coagulated structure that is under the coil are caused by the monopolar and spontaneous (non-advective) type of self-coagulation. The analysis predicts an intensity order of physically driven coagulation force, chemical self-coagulation force, and ambipolar self-coagulation force. The popular coagulated structure of the electronegative ICP sources is urgently needed to validate the experiment.