Numerical investigation of ion energy distribution and ion angle distribution in a dual-frequency capacitively coupled plasma with a hybrid model
Author:
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2780136
Reference34 articles.
1. Principles of Plasma Discharges and Materials Processing
2. Numerical investigation of ion-energy-distribution functions in single and dual frequency capacitively coupled plasma reactors
3. Simulation of Capacitively Coupled Single- and Dual-Frequency RF Discharges
4. Charge Exchange Ion Energy Distribution at the RF Electrode in a Plasma Etching Chamber
5. Angular ion and neutral energy distribution in a collisional rf sheath
Cited by 37 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Self-Coagulation Theory and Related Comet- and Semi-Circle-Shaped Structures in Electronegative and Gaseous Discharging Plasmas in the Laboratory;Applied Sciences;2024-09-08
2. Investigation of the dual-frequency bias effect on inductively coupled Cl2 plasmas by hybrid simulation;Journal of Physics D: Applied Physics;2023-06-08
3. Angular distribution measurement of high-energy argon neutral and ion in a 13.56 MHz capacitively-coupled plasma;Applied Physics Express;2021-11-10
4. eduPIC: an introductory particle based code for radio-frequency plasma simulation;Plasma Sources Science and Technology;2021-09-01
5. Surface processes in low-pressure capacitive radio frequency discharges driven by tailored voltage waveforms;Plasma Sources Science and Technology;2020-07-13
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3