Evolution of ferroelectric HfO2 in ultrathin region down to 3 nm
Author:
Affiliation:
1. Department of Materials Engineering, The University of Tokyo, Hongo, Tokyo 113-8656, Japan
2. National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba 305-8569, Japan
Funder
China Scholarship Council
MEXT | JST | Core Research for Evolutional Science and Technology
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
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