Focused ion beam high resolution grayscale lithography for silicon-based nanostructures
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4866586
Reference33 articles.
1. Rapid Prototyping of Fresnel Zone Plates via Direct Ga+ Ion Beam Lithography for High-Resolution X-ray Imaging
2. Compact efficient broadband grating coupler for silicon-on-insulator waveguides
3. Integrated Luneburg lens via ultra-strong index gradient on silicon
4. Plasmonic Luneburg and Eaton lenses
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