Rapid Prototyping of Fresnel Zone Plates via Direct Ga+ Ion Beam Lithography for High-Resolution X-ray Imaging
Author:
Affiliation:
1. Max Planck Institute for Intelligent Systems, Heisenbergstrasse 3, D-70569 Stuttgart, Germany
Publisher
American Chemical Society (ACS)
Subject
General Physics and Astronomy,General Engineering,General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/nn403295k
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