Sequential reactions of SiD+2 with SiD4
Author:
Publisher
AIP Publishing
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.462834
Reference20 articles.
1. A model for the discharge kinetics and plasma chemistry during plasma enhanced chemical vapor deposition of amorphous silicon
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3. On the Decomposition of Silane in Plasma Deposition Reactors
4. Ion chemistry in silane dc discharges
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